IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

1999 IEEE MTT-S International Microwave Symposium Digest

Author(s): Jun-Bo Yoon ; Chul-Hi Han ; Euisik Yoon ; Choong-Ki Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Anaheim, CA, USA, USA
Conference Date: 13 June 1999
Volume: 4
Page Count: 4
ISBN (Paper): 0-7803-5135-5
DOI: 10.1109/MWSYM.1999.780245
Regular:

Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have... View More

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