IEEE - Institute of Electrical and Electronics Engineers, Inc. - A capacitance-voltage measurement method for DMOS transistor channel length extraction

Proceedings of International Conference on Microelectronic Test Structures

Author(s): Olsson, J. ; Valtonen, R. ; Heinle, U. ; Vestling, L. ; Soderbarg, A. ; Norde, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Goteborg, Sweden, Sweden
Conference Date: 15 March 1999
Page(s): 135 - 140
ISBN (Paper): 0-7803-5270-X
DOI: 10.1109/ICMTS.1999.766231
Regular:

This paper reports a new measurement method for extraction of sub-micrometer channel lengths in DMOS transistors. The method is based on capacitance-voltage measurements of the gate to source,... View More

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