IEEE - Institute of Electrical and Electronics Engineers, Inc. - Test structure design for a fast and simple evaluation of carrier mobilities in highly injected regions

Proceedings of International Conference on Microelectronic Test Structures

Author(s): Persiano, G.V.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Goteborg, Sweden, Sweden
Conference Date: 15 March 1999
Page(s): 99 - 104
ISBN (Paper): 0-7803-5270-X
DOI: 10.1109/ICMTS.1999.766224
Regular:

This paper describes the use and the design of a microelectronic test structure to show a new fast and simple DC method for measuring the dependence of carrier mobilities upon carrier... View More

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