IEEE - Institute of Electrical and Electronics Engineers, Inc. - Comparison of sheet-resistance measurements obtained by standard and small-area four-point probing

Proceedings of International Conference on Microelectronic Test Structures

Author(s): Guillaume, N.M.P. ; Cresswell, M.W. ; Allen, R.A. ; Everist, S. ; Linholm, L.W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Goteborg, Sweden, Sweden
Conference Date: 15 March 1999
Page(s): 62 - 66
ISBN (Paper): 0-7803-5270-X
DOI: 10.1109/ICMTS.1999.766217
Regular:

A modification of the standard four-point probing technique has been developed for measurement of the sheet resistance of conducting films. Although the areas of unpatterned film that are required... View More

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