IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of current flow in mono-crystalline electrical linewidth structures

Proceedings of International Conference on Microelectronic Test Structures

Author(s): Smith, S. ; Lindsay, I.A.B. ; Walton, A.J. ; Cresswell, M.W. ; Linholm, L.W. ; Allen, R.A. ; Fallon, M. ; Gundlach, A.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Goteborg, Sweden, Sweden
Conference Date: 15 March 1999
Page(s): 7 - 12
ISBN (Paper): 0-7803-5270-X
DOI: 10.1109/ICMTS.1999.766207
Regular:

The current flow in lightly doped mono-crystalline silicon structures designed for use as low cost secondary reference linewidth standards is investigated. It is demonstrated that surface charge... View More

Advertisement