IEEE - Institute of Electrical and Electronics Engineers, Inc. - A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices

11th International Symposium on Power Semiconductor Devices and ICs. ISPSD '99

Author(s): Furbock, C. ; Thalhammer, R. ; Litzenberger, M. ; Seliger, N. ; Pogany, D. ; Gornik, E. ; Wachutka, G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1999
Conference Location: Toronto, Ont., Canada, Canada
Conference Date: 26 May 1999
Page(s): 193 - 196
ISBN (Paper): 0-7803-5290-4
ISSN (Paper): 1063-6854
DOI: 10.1109/ISPSD.1999.764095
Regular:

We present a differential backside laser probing technique for the investigation of lateral temperature variations in power devices. The method is applied to analyze the temperature evolution in... View More

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