IEEE - Institute of Electrical and Electronics Engineers, Inc. - Temperature possibilities of GaAs membrane pressure sensor

1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98

Author(s): Baranov, A.V. ; Dragunov, V.P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Novosibirsk, Russia, Russia
Conference Date: 23 September 1998
Page(s): 449 - 451
ISBN (Paper): 0-7803-4938-5
DOI: 10.1109/APEIE.1998.769013
Regular:

Results have been given of a calculation and of an experimental study of the GaAs membrane pressure sensor (MPS) characteristics. The analysis of our results shows that GaAs MPS have the... View More

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