IEEE - Institute of Electrical and Electronics Engineers, Inc. - Technological vacuum-arc sources of plasma for electronics industry

1998 4th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-98

Author(s): Lisenkov, A.A. ; Merva, N.V.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Novosibirsk, Russia, Russia
Conference Date: 23 September 1998
Page(s): 57 - 58
ISBN (Paper): 0-7803-4938-5
DOI: 10.1109/APEIE.1998.768909
Regular:

The physical features and main formation laws of various geometry plasma streams, generated by technological vacuum-arc plasma sources are presented. Applications to plasma deposition in the... View More

Advertisement