IEEE - Institute of Electrical and Electronics Engineers, Inc. - Estimation of physical constants of silicon-based polymer thin films using surface acoustic waves and their application to liquid sensor

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Furukawa, S. ; Nomura, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 2
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.765061
Regular:

Physical constants of poly(di-methyl silane) are estimated from the characteristics of the surface acoustic wave (SAW) propagating along poly(di-methyl silane)/(128/spl deg/rot.Y-X) LiNbO/sub 3/... View More

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