IEEE - Institute of Electrical and Electronics Engineers, Inc. - Film bulk acoustic wave filters using lead titanate on silicon substrate

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Misu, K. ; Nagatsuka, T. ; Wadaka, S. ; Maeda, C. ; Yamada, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 2
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.765021
Regular:

A film bulk acoustic wave resonator and filter at GHz frequencies is reported. The resonator and filter employ lead titanate (PbTiO/sub 3/) as the piezoelectric thin film. The films are formed by... View More

Advertisement