IEEE - Institute of Electrical and Electronics Engineers, Inc. - Solidly mounted resonator based on aluminum nitride thin film

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Dubois, M.-A. ; Muralt, P. ; Matsumoto, H. ; Plessky, V.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762291
Regular:

A piezoelectric thin film sandwiched between two conductors is the basic structure for high frequency bulk acoustic wave devices. For that purpose, AlN thin films deposited by DC reactive... View More

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