IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of elastic properties of thin film ZnO by resonance method

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Jade, S.A. ; Smits, J.G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762213
Regular:

The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies... View More

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