IEEE - Institute of Electrical and Electronics Engineers, Inc. - A touch probe sensor using longitudinal vibration of PZT thin film transducer

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Kanda, T. ; Morita, T. ; Kurosawa, M.K. ; Higuchi, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762193
Regular:

Touch probe sensors, rod-shaped and flat-type, have been fabricated. These sensors use the longitudinal vibration of PZT thin film transducer. The latter has been improved by miniaturization and... View More

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