IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of ZnO thin films for SAW devices by the ultrasonic spray pyrolysis technique

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Hagbong Kim ; Youngjin Lee ; Yongrae Roh ; Jinyoung Jung ; Manhyeong Lee ; Hyukchae Kwon
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762156
Regular:

ZnO thin films for use in SAW filters have been prepared on SiO/sub 2//Si substrates by the ultrasonic spray pyrolysis technique. Thickness of the films has been determined through a SAW... View More

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