IEEE - Institute of Electrical and Electronics Engineers, Inc. - Characterization of the SAW propagation properties for zinc oxide films on silicon carbide

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Hickernell, F.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762144
Regular:

The surface acoustic wave (SAW) propagation properties of zinc oxide (ZnO) films on silicon carbide (SiC) have been initially characterized using interdigital transducer (IDT) structures in four... View More

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