IEEE - Institute of Electrical and Electronics Engineers, Inc. - High resolution laser-interferometric probing of SAW devices

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Knuuttila, J. ; Tikka, P. ; Thorvaldsson, T. ; Hashimoto, K.-Y. ; Salomaa, M.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762135
Regular:

Measurements on the surface-acoustic wave profiles in various SAW devices have been performed with a scanning laser interferometer. SAW profiles at frequencies up to 1 GHz are obtained with our... View More

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