IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effect of the sputtering parameters on the growth and piezoelectric properties of zinc oxide thin films

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Kutepova, V.P. ; Hall, D.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762131
Regular:

In this paper the potential of zinc oxide (ZnO) thin films as a piezoelectric material for surface acoustic wave (SAW) sensor developments is discussed. ZnO thin films were deposited by RF... View More

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