IEEE - Institute of Electrical and Electronics Engineers, Inc. - Preparation of piezoelectric ZnO films by target facing type of sputtering method

1998 IEEE Ultrasonics Symposium. Proceedings

Author(s): Hashimoto, K.-Y. ; Ogawa, S. ; Nonoguchi, A. ; Omori, T. ; Yamaguchi, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Sendai, Japan, Japan
Conference Date: 5 October 1998
Volume: 1
ISBN (Paper): 0-7803-4095-7
ISSN (Paper): 1051-0117
DOI: 10.1109/ULTSYM.1998.762130
Regular:

This paper describes the preparation of piezoelectric ZnO films by target facing type of sputtering (TFTS) method. The method enables to generate high density plasma under a low gas pressure of... View More

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