IEEE - Institute of Electrical and Electronics Engineers, Inc. - Photochemical Hydrogen Desorption From Hydrogen-terminated Silicon by VUV Photons

Technical Digest 1998 EQEC European Quantum Electronics Conference

Author(s): Pusel, A. ; Wetterauer, U. ; Hess, P.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Glasgow, UK, UK
Conference Date: 18 September 1998
Page(s): 235
ISBN (Paper): 0-7803-4231-3
DOI: 10.1109/EQEC.1998.715136
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