IEEE - Institute of Electrical and Electronics Engineers, Inc. - Testing requirements for microelectromechanical systems (MEMS)

1998 IEEE AUTOTESTCON Proceedings. IEEE Systems Readiness Technology Conference. Test Technology for the 21st Century (Cat. No.98CH36179)

Author(s): Salmon, L.G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1998
Conference Location: Salt Lake City, UT, USA, USA
Conference Date: 25 August 1998
ISBN (Paper): 0-7803-4420-0
ISSN (Paper): 1088-7725
DOI: 10.1109/AUTEST.1998.713436
Regular:

This presentation addresses some of these challenges and outlines potential approaches to overcoming them. Examples of the many energy domains encountered in MEMS devices will be provided and... View More

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