IEEE - Institute of Electrical and Electronics Engineers, Inc. - High reliability metal insulator metal capacitors for silicon germanium analog applications

Proceedings of the 1997 Bipolar/BiCMOS Circuits and Technology Meeting

Author(s): Stein, K. ; Kocis, J. ; Hueckel, G. ; Eld, E. ; Bartush, T. ; Groves, R. ; Greco, N. ; Harame, D. ; Tewksbury, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Minneapolis, MN, USA
Conference Date: 28 September 1997
Page(s): 191 - 194
ISBN (Paper): 0-7803-3916-9
ISSN (Paper): 1088-9299
DOI: 10.1109/BIPOL.1997.647433
Regular:

In this work, a novel "planar" metal-insulator-metal capacitor (MIMCAP) process is introduced, integrated in a Silicon Germanium (SiGe) HBT process, which has excellent yield, reliability... View More

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