IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel optical probing system for quarter-/spl mu/m VLSI circuits

Proceedings Sixth Asian Test Symposium (ATS'97)

Author(s): Ozaki, K. ; Sekiguchi, H. ; Wakana, S. ; Goto, Y. ; Umehara, Y. ; Matsumoto, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Akita, Japan, Japan
Conference Date: 17 November 1997
Page(s): 208 - 213
ISBN (Paper): 0-8186-8209-4
ISSN (Paper): 1081-7735
DOI: 10.1109/ATS.1997.643960
Regular:

An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and... View More

Advertisement