IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new auto-focus method in critical dimension measurement SEM

Proceedings Sixth Asian Test Symposium (ATS'97)

Author(s): Komatsu, F. ; Motaki, H. ; Miyoshi, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Akita, Japan, Japan
Conference Date: 17 November 1997
Page(s): 202 - 207
ISBN (Paper): 0-8186-8209-4
ISSN (Paper): 1081-7735
DOI: 10.1109/ATS.1997.643959
Regular:

We have developed a new auto-focus method using the image processing technology. This method consists of two steps. The first step is the preset of the objective lens condition with the feedback... View More

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