IEEE - Institute of Electrical and Electronics Engineers, Inc. - Cathodoluminescence evaluation of electrical stress condition of Si-SiO/sub 2/ structures

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Liu, X. ; Chan, D.S.H. ; Phang, J.C.H. ; Chim, W.K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 270 - 274
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638345
Regular:

In this paper, we describe the observation of a new phenomenon which may be extended to provide a non electrical and physical evaluation of the electrical stress degradation of Si-SiO/sub 2/... View More

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