IEEE - Institute of Electrical and Electronics Engineers, Inc. - Scanning acoustic microscope (SAM)-a measurement tool for plastic IC packages

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Nagalingam, J. ; Mohd-Yusoff, S.D. ; Ramakrishnan, P. ; Jaafar, R. ; Francis, C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 244 - 249
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638324
Regular:

Theoretically, using a 15 MHz transducer, the Scanning Acoustic Microscope (SAM) is shown to have a detection capability of a peak within /spl lambda//4 for a depth of 0.06 mm of a typical plastic... View More

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