IEEE - Institute of Electrical and Electronics Engineers, Inc. - Identification of process defects using back side emission microscopy

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Chun-Sheng Liu ; Charng-E Peng ; Chen-Chung Hsu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 230 - 233
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638219
Regular:

As the CMOS is scaling down quickly, the accurate and precise diagnosis of the process failure mechanisms in the ULSI circuits becomes more difficult and time consuming. In this paper, a new... View More

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