IEEE - Institute of Electrical and Electronics Engineers, Inc. - Charging identification and compensation in the scanning electron microscope

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Wong, W.K. ; Thong, J.T.L. ; Phang, J.C.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 97 - 102
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638151
Regular:

Common charging artifacts in the scanning electron microscope (SEM) are discussed. A novel method employing front-end control of the SEM beam voltage and scanning to achieve charging compensation... View More

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