IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis and quantification of device spectral signatures observed using a spectroscopic photon emission microscope

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Tao, J.M. ; Chim, W.K. ; Chan, D.S.H. ; Phang, J.C.H. ; Liu, Y.Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 33 - 38
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638069
Regular:

Two normalisation methods have been introduced for the analysis and quantification of device spectral signatures obtained from the spectroscopic photon emission microscope (SPEMS). The parameter:... View More

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