IEEE - Institute of Electrical and Electronics Engineers, Inc. - The infrared photoemission microscope as a tool for semiconductor device failure analysis

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

Author(s): Trigg, A.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Singapore
Conference Date: 25 July 1997
Page(s): 21 - 26
ISBN (Paper): 0-7803-3985-1
DOI: 10.1109/IPFA.1997.638067
Regular:

An infrared photoemission microscope (IRPEM) based on a cadmium mercury telluride (CMT) focal plane array, developed originally for astronomical applications and covering the wavelength range 800... View More

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