IEEE - Institute of Electrical and Electronics Engineers, Inc. - IC microsensors-between system and technology

1997 2nd IEEE-CAS Region 8 Workshop on Analog and Mixed IC Design

Author(s): Haberli, A. ; Mayer, F. ; Jaeggi, D. ; Baltes, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Baveno, Italy, Italy
Conference Date: 12 September 1997
Page(s): 36 - 40
ISBN (Paper): 0-7803-4240-2
DOI: 10.1109/AMICD.1997.637188
Regular:

In the last 25 years the area of transducers has been enriched by integrated microtransducers, i.e. miniaturized sensors and actuators, designed and fabricated using methods reminiscent of silicon... View More

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