IEEE - Institute of Electrical and Electronics Engineers, Inc. - A micromachined vibration isolation system for a 1 GHz STW resonator

Proceedings of International Frequency Control Symposium

Author(s): Reid, J.R. ; Bright, V.M. ; Kosinski, J.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Orlando, FL, USA
Conference Date: 30 May 1997
Page(s): 783 - 790
ISBN (Paper): 0-7803-3728-X
DOI: 10.1109/FREQ.1997.639191
Regular:

A micromachined system has been developed for reducing the vibration sensitivity of surface transverse wave (STW) resonators. The isolation system consists of a support platform for mounting the... View More

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