IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultrasonic properties of PZT thin films in UHF-SHF ranges-prepared by sol gel method

Proceedings of International Frequency Control Symposium

Author(s): Yamaguchi, M. ; Hashimoto, K. ; Nanjo, R. ; Hanazawa, N. ; Ttsutsumi, S. ; Yonezawa, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Orlando, FL, USA
Conference Date: 30 May 1997
Page(s): 544 - 551
ISBN (Paper): 0-7803-3728-X
DOI: 10.1109/FREQ.1997.638699
Regular:

A study of piezoelectric and ultrasonic properties was carried out for PZT films of 0.22 to 2.65 /spl mu/m thickness prepared by the sol gel method. First, bulk wave transducers were fabricated... View More

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