IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of a MEMS testing methodology

Proceedings International Test Conference 1997

Author(s): Kolpekwar, A. ; Blanton, R.D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Washington, DC, USA, USA
Conference Date: 6 November 1997
Page(s): 923 - 931
ISBN (Paper): 0-7803-4209-7
ISSN (Paper): 1089-3539
DOI: 10.1109/TEST.1997.639707
Regular:

Microelectromechanical systems (MEMS) are miniature electromechanical sensor and actuator systems developed from the mature batch-fabricated processes of VLSI technologies. Projected growth... View More

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