IEEE - Institute of Electrical and Electronics Engineers, Inc. - Quality of SOI film after surface smoothing with hydrogen annealing, touch-polishing

1997 IEEE International SOI Conference Proceedings

Author(s): Maszara, W.P. ; Gondran, C.F.H. ; Jackett-Murphy, S. ; Vasudev, P.K. ; Iyer, S.S. ; Anc, M.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Fish Camp, CA, USA, USA
Conference Date: 6 October 1997
Page(s): 130 - 131
ISBN (Paper): 0-7803-3938-X
ISSN (Paper): 1078-621X
DOI: 10.1109/SOI.1997.634967
Regular:

We have conducted an investigation to evaluate the impact of both touch-polish and hydrogen annealing at different temperatures on the roughness, on the SOI film removal, as well as the impact of... View More

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