IEEE - Institute of Electrical and Electronics Engineers, Inc. - Behavior of indium in thin SOI films

1997 IEEE International SOI Conference Proceedings

Author(s): Jacobs, J.B. ; Schiebel, R. ; Joyner, K. ; Houston, T.W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Fish Camp, CA, USA, USA
Conference Date: 6 October 1997
Page(s): 68 - 69
ISBN (Paper): 0-7803-3938-X
ISSN (Paper): 1078-621X
DOI: 10.1109/SOI.1997.634936
Regular:

The behavior of indium implanted in silicon-on-insulator (SOI) material is explored by using SIMS analysis to obtain the doping concentration profile as a function of the silicon film... View More

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