IEEE - Institute of Electrical and Electronics Engineers, Inc. - A fast method for conductivity type determination in thin SOI films

1997 IEEE International SOI Conference Proceedings

Author(s): Henaux, S. ; Mondon, F. ; Reimbold, G.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Fish Camp, CA, USA, USA
Conference Date: 6 October 1997
Page(s): 34 - 35
ISBN (Paper): 0-7803-3938-X
ISSN (Paper): 1078-621X
DOI: 10.1109/SOI.1997.634919
Regular:

The doping of Silicon-on-Insulator (SOI) thin films can be substantially modified during wafer fabrication, when compared to bulk starting material. Conductivity type identification thus... View More

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