IEEE - Institute of Electrical and Electronics Engineers, Inc. - Effects of humidity on electric field distribution in polyimide insulation in microelectronics applications

IEEE 1997 Annual Report Conference on Electrical Insulation and Dielectric Phenomena

Author(s): Bloss, P. ; De Reggi, A.S. ; Schafer, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Minneapolis, MN, USA, USA
Conference Date: 19 October 1997
Volume: 1
ISBN (Paper): 0-7803-3851-0
DOI: 10.1109/CEIDP.1997.634612
Regular:

With large scale integration in microelectronics, the thickness of insulation between closely spaced conductors at different potentials is reduced to the micrometer range and the electric field in... View More

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