IEEE - Institute of Electrical and Electronics Engineers, Inc. - Self-healing breakdown characteristics of polyimide thin films-effect of ambient gas on breakdown characteristics

IEEE 1997 Annual Report Conference on Electrical Insulation and Dielectric Phenomena

Author(s): Muramoto, Y. ; Nagao, M. ; Kosaki, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Minneapolis, MN, USA, USA
Conference Date: 19 October 1997
Volume: 1
ISBN (Paper): 0-7803-3851-0
DOI: 10.1109/CEIDP.1997.634583
Regular:

We have been studying the breakdown characteristics of polyimide (PI) thin films to try and take advantage of self-healing breakdown. This paper focuses on the effect of ambient gas (SF/sub 6/,... View More

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