IEEE - Institute of Electrical and Electronics Engineers, Inc. - Charge storage in APCVD silicon nitride

IEEE 1997 Annual Report Conference on Electrical Insulation and Dielectric Phenomena

Author(s): Amjadi, H. ; Sessler, G.M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Minneapolis, MN, USA, USA
Conference Date: 19 October 1997
Volume: 1
ISBN (Paper): 0-7803-3851-0
DOI: 10.1109/CEIDP.1997.634559
Regular:

Silicon nitride is widely used as a dielectric in semiconductor devices or as membrane material in micromachined sensors and actuators. In this paper, preliminary results on investigations of... View More

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