IEEE - Institute of Electrical and Electronics Engineers, Inc. - Particle generation of ceramic emitters for cleanroom air ionizers

Proceedings of 18th Annual Electrical Overstress/Electrostatic Discharge Symposium

Author(s): Okano, K. ; Posadas, A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Santa Clara, California, USA, USA
Conference Date: 23 September 1997
Page(s): 287 - 291
ISBN (Paper): 1-878303-69-4
DOI: 10.1109/EOSESD.1997.634254
Regular:

The ceramic emitter which is composed of a needle-shaped silicon and a silicon carbide ceramic rod was developed for an LSI cleanroom air ionizer. The concentration of the particles generated from... View More

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