IEEE - Institute of Electrical and Electronics Engineers, Inc. - Anodic Alumina: A Promising Constructional Material For Vacuum And Semiconductor Microelectronics

Author(s): Mukhurov, N.I. ; Efremov, G.I. ; Kotova, I.F.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Kyongju, Korea, Korea
Conference Date: 17 August 1997
Page(s): 617 - 621
ISBN (Paper): 0-7803-3786-7
DOI: 10.1109/IVMC.1997.627662
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