IEEE - Institute of Electrical and Electronics Engineers, Inc. - Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

Author(s): Nagao, M. ; Fujimori, Y. ; Gotoh, Y. ; Tsuji, H. ; Ishikawa, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Kyongju, Korea, Korea
Conference Date: 17 August 1997
Page(s): 608 - 612
ISBN (Paper): 0-7803-3786-7
DOI: 10.1109/IVMC.1997.627660
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