IEEE - Institute of Electrical and Electronics Engineers, Inc. - Addressing environment, health and safety in semiconductor process development

Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium

Author(s): Mendicino, L. ; Beu, L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Austin, TX, USA
Conference Date: 13 October 1997
Page(s): 129 - 133
ISBN (Paper): 0-7803-3929-0
ISSN (Paper): 1089-8190
DOI: 10.1109/IEMT.1997.626888
Regular:

Motorola has traditionally focused on cost, yield, performance, and logistics as primary drivers for decision-making. In the semiconductor industry, environment, health and safety (EHS) issues... View More

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