IEEE - Institute of Electrical and Electronics Engineers, Inc. - Recipe generation for large-area meniscus coating using Kalman filter estimation

Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium

Author(s): Krauss, A.F. ; Kamen, E.W. ; Chng, C.M. ; The, A.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Austin, TX, USA
Conference Date: 13 October 1997
Page(s): 76 - 80
ISBN (Paper): 0-7803-3929-0
ISSN (Paper): 1089-8190
DOI: 10.1109/IEMT.1997.626880
Regular:

Material deposition is one of the repeated, and important, steps in electronics manufacturing. Meniscus coating is a low-waste technique that may be used in applications where spin coating is... View More

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