IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling and simulation of a Petri nets-based diffusion cell controller in an IC CIM system

1997 IEEE International Conference on Systems, Man, and Cybernetics. Computational Cybernetics and Simulation

Author(s): Chengche Feng ; Wan-Chung Hong
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Orlando, FL, USA, USA
Conference Date: 12 October 1997
Volume: 2
ISBN (Paper): 0-7803-4053-1
ISSN (Paper): 1062-922X
DOI: 10.1109/ICSMC.1997.638110
Regular:

We develop a systematic approach to analyze, model and simulate the diffusion cell controller (C/C) in a computer integrated manufacturing (CIM) system of an integrated circuit (IC) wafer by using... View More

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