IEEE - Institute of Electrical and Electronics Engineers, Inc. - Artificial immunity based management system for a semiconductor production line

1997 IEEE International Conference on Systems, Man, and Cybernetics. Computational Cybernetics and Simulation

Author(s): Mori, K. ; Tsukiyama, M. ; Fukuda, T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Orlando, FL, USA, USA
Conference Date: 12 October 1997
Volume: 1
ISBN (Paper): 0-7803-4053-1
ISSN (Paper): 1062-922X
DOI: 10.1109/ICSMC.1997.626207
Regular:

A semiconductor production line is a large scale and complex system. It is considered to be difficult to control because there exist lots of malfunctions such as maintenance of equipment,... View More

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