IEEE - Institute of Electrical and Electronics Engineers, Inc. - Simulation study of an X-ray lithography cell: background and objectives

1997 IEEE International Conference on Systems, Man, and Cybernetics. Computational Cybernetics and Simulation

Author(s): Preston White, K., Jr. ; Trybula, W.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1997
Conference Location: Orlando, FL, USA, USA
Conference Date: 12 October 1997
Volume: 1
ISBN (Paper): 0-7803-4053-1
ISSN (Paper): 1062-922X
DOI: 10.1109/ICSMC.1997.625790
Regular:

The next generation of semiconductor devices will realize integrated circuits with critical dimensions on the order of 0.18 microns. Achieving these small geometries presents a host of challenges... View More

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