IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electron-beam MCM substrate tester

Proceedings of IEEE Multi-Chip Module Conference (MCMC-93)

Author(s): Brunner, M. ; Schmid, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Santa Cruz, CA, USA, USA
Conference Date: 15 May 1993
Page(s): 62 - 68
ISBN (Paper): 0-8186-3540-1
DOI: 10.1109/MCMC.1993.302150
Regular:

An electron beam MCM substrate tester that is now installed in a fabrication line is discussed. It provides a spot size of below 25- mu m to probe pads in a 30 cm*30 cm field without mechanical... View More

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