IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microelectromechanical systems: a new technology for biomedical applications

Author(s): Neurnan, M.R. ; Fair, R.B. ; Mehregany, M. ; Massoud, H.Z.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: San Diego, CA
Conference Date: 31 October 1993
Page(s): 1,545 - 1,546
ISBN (Paper): 0-7803-1377-1
DOI: 10.1109/IEMBS.1993.979274
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