IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plasma processing

International Conference on Plasma Sciences (ICOPS)

Author(s): Graves, D.B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1993
Conference Location: Vancouver, BC, Canada, Canada
Conference Date: 7 June 1993
ISBN (Paper): 0-7803-1360-7
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1993.593511
Regular:

Summary form only given. The author discusses gas discharge plasmas and the development of plasmas as a key technology in materials processing. The focus is on the use of plasmas in electronic... View More

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